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Force-balance interface circuit based on floating MOSFET capacitors for micro-machined capacitive accelerometers
Gómez Cama, José Ma.; Bota Ferragut, Sebastián Antonio; Marco Colás, Santiago; Samitier i Martí, Josep
Universitat de Barcelona
2010-05-04
Circuits integrats
Microelectrònica
Detectors
CMOS integrated circuits
MOSFET circuits
Accelerometers
Capacitive sensors
Delta-sigma modulation
Micromachining
Microsensors
Switched capacitor networks
(c) IEEE, 2006
Article
IEEE
         

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