To access the full text documents, please follow this link: http://hdl.handle.net/2445/32234

Ellipsometric study of a-Si:H thin films deposited by square wave modulated rf glow discharge
Lloret, A.; Bertran Serra, Enric; Andújar Bella, José Luis; Canillas i Biosca, Adolf; Morenza Gil, José Luis
Universitat de Barcelona
2012-10-09
Pel·lícules fines
Semiconductors amorfs
Silici
El·lipsometria
Thin films
Amorphous semiconductors
Silicon
Ellipsometry
(c) American Institute of Physics , 1991
Article
Article - Published version
American Institute of Physics
         

Show full item record

Related documents

Other documents of the same author

Andújar Bella, José Luis; Bertran Serra, Enric; Canillas i Biosca, Adolf; Campmany i Guillot, Josep, 1966-; Morenza Gil, José Luis
Andújar Bella, José Luis; Bertran Serra, Enric; Canillas i Biosca, Adolf; Campmany i Guillot, Josep, 1966-; Serra-Miralles, J.; Roch i Cunill, Carles; Lloret, A.
Canillas i Biosca, Adolf; Bertran Serra, Enric; Andújar Bella, José Luis; Drevillon, B.
Campmany i Guillot, Josep, 1966-; Costa i Balanzat, Josep; Canillas i Biosca, Adolf; Andújar Bella, José Luis; Bertrán Serra, Enric
 

Coordination

 

Supporters