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Particle agglomeration study in rf silane plasmas: In situ study by polarization-sensitive laser light scattering
Courteille, C.; Hollenstein, Ch.; Dorier, J. L.; Gay, P.; Schwarzenbach, W.; Howling, A. A.; Bertrán Serra, Enric; Viera Mármol, Gregorio; Martins, R.; Macarico, A.
Universitat de Barcelona
Matèria condensada
Propietats òptiques
Condensed matter
Optical properties
(c) American Institute of Physics , 1996
Article - Published version
American Institute of Physics

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