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Micro-Raman study of stress distribution in local isolation structures and correlation with transmission electron microscopy
De Wolf, I.; Vanhellemont, J.; Romano Rodríguez, Alberto; Norström, H.; Maes, H.E.
Universitat de Barcelona
2012-10-08
Pel·lícules fines
Química física
Thin films
Physical and theoretical chemistry
(c) American Institute of Physics , 1992
Article
Article - Published version
American Institute of Physics
         

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