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Title:
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Use of information on the manufacture of samples for the optical characterization of multilayers through a global optimization
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Author:
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Sancho i Parramon, Jordi; Ferré Borrull, Josep; Bosch i Puig, Salvador; Ferrara, Maria Christina
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Other authors:
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Universitat de Barcelona |
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Abstract:
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We present a procedure for the optical characterization of thin-film stacks from spectrophotometric data. The procedure overcomes the intrinsic limitations arising in the numerical determination of manyparameters from reflectance or transmittance spectra measurements. The key point is to use all theinformation available from the manufacturing process in a single global optimization process. The method is illustrated by a case study of solgel applications. |
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Publication date:
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2012-07-13 |
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Subject(s):
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Òptica electrònica Electron optics |
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Rights:
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(c) Optical Society of America, 2003
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Document type:
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Article |
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