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Roughness and light scattering of ion-beam-sputtered fluoride coatings for 193 nm
Ferré Borrull, Josep; Duparré, Angela; Quesnel, Etienne
Universitat de Barcelona
2012-07-13
Dispersió de la llum
Òptica electrònica
Light scattering
Electron optics
(c) Optical Society of America, 2000
Article
Optical Society of America
         

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