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Title:
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Template fabrication of 3D metallic microstructures by electrochemical etching and electroplanting
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Author:
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Hernández Díaz, David; Lange, Diego; Todorov Trifonov, Trifon; Garin Escriva, Moises; García Molina, Francisco Miguel; Rodríguez Martínez, Ángel; Alcubilla González, Ramón
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Other authors:
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Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
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Abstract:
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In this work, we show that macroporous silicon consisting of periodic arrays of etched pores is a feasible alternative for synthesis of 2D and 3d metallic microstructures due to its flexibility in the definition of complex geometries bulk. In addition macroporous silicon features full three-dimensionality, well controlled pore distribution and growth, and scalable dimensions (0.5-100 μm). We present here the fabrication of 3D Ni micro-structures by electroplating of macroporous silicon templates. The given approach can be applied for depositions of different metals and in more complicated template-structures. |
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Publication date:
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2012-05-11 |
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Subject(s):
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Àrees temàtiques de la UPC::Energies::Recursos energètics renovables Nanotechnology -- Research 3D metallic microstructures Nanotecnologia -- Investigació |
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Rights:
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Open Access |
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Document type:
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Conference Object |
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