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Fixed charge density in dielectrics deposited on c-Si using space charge region dominated lifetime measurements
Garin Escriva, Moises; Martín García, Isidro; Bermejo Broto, Sandra; Alcubilla González, Ramón
Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
2012-05-10
Àrees temàtiques de la UPC::Enginyeria electrònica i telecomunicacions::Microelectrònica
Dielectrics.
Silicon.
Charge density
Crystalline materials
Dielectric materials
Electric space charge
Lifetime measurements
Photoconductivity
Photoconductance techniques
Quasisteady-state
Silicon wafers
DRM
Dielèctrics
Silici
Restricted access - publisher's policy
Article
American Institute of Physics
         

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