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A fully automated hot-wall multiplasma-monochamber reactor for thin film deposition
Roca i Cabarrocas, P. (Pere); Chevrier, J. B.; Huc, J.; Lloret, A.; Parey, J. Y.; Schmitt, J. P. M.
Universitat de Barcelona
Pel·lícules fines
Semiconductors amorfs
Cèl·lules solars
Thin films
Amorphous semiconductors
Radio frequency
Solar cells
(c) American Institute of Physics 1991
American Institute of Physics

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