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Production of nanometric particles in radio frequency glow discharges in mixtures of silane and methane
Bertrán Serra, Enric; Costa i Balanzat, Josep; Viera Mármol, Gregorio; Zhang, R.Q.
Universitat de Barcelona
2012-05-08
Radiofreqüència
Ceràmica industrial
Aliatges de silici
Pel·lícules fines
Radio frequency
Ceramics
Silicon alloys
Thin films
(c) American Institute of Physics 1996
Article
American Institute of Physics
         

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