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Polymorphous Si thin films from radio frequency plasmas of SiH4 diluted in Ar: A study by transmission electron microscopy and Raman spectroscopy
Viera Mármol, Gregorio; Huet, S.; Bertrán Serra, Enric; Boufendi, L.
Universitat de Barcelona
2012-05-03
Pel·lícules fines
Espectroscòpia Raman
Nanoestructures
Microelectrònica
Radiofreqüència
Optoelectrònica
Thin films
Raman spectroscopy
Nanostructures
Microelectronics
Radio frequency
Optoelectronics
(c) American Institute of Physics, 2001
Article
American Institute of Physics
         

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