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Raman microstructural analysis of silicon-on-insulator formed by high dose oxygen ion implantation: As-implanted structures
Macía Santamaría, Javier; Martín, E.; Pérez Rodríguez, Alejandro; Jiménez, J.; Morante i Lleonart, Joan Ramon; Aspar, Bernard; Margail, Jacques
Universitat de Barcelona
2012-05-03
Cristal·lografia
Superfícies (Física)
Crystallography
Surfaces (Physics)
(c) American Institute of Physics, 1997
Article
American Institute of Physics
         

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