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Vacancy and interstitial depth profiles in ion-implanted silicon
Leveque, P.; Kortegaard Nielsen, H.; Pellegrino, Paolo; Hallen, A.; Svensson, Bengt G.; Kuznetsov, Andrej; Wong-Leung, J.; Jagadish, C. (Chennupati); Privitera, V.
Universitat de Barcelona
2012-05-03
Cristal·lografia
Estructura electrònica
Crystallography
Electronic structure
(c) American Institute of Physics, 2003
Article
American Institute of Physics
         

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