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| Title: | Ultrafine particles produced by plasma enhanced chemical vapor deposition -from SiH4, CH4, NH3 and B2H6 gas mixtures- for nanostructured ceramics applications |
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| Author: | Bertrán Serra, Enric; Costa i Balanzat, Josep; Viera Mármol, Gregorio; Andújar Bella, José Luis; Canillas i Biosca, Adolf; Pascual Miralles, Esther |
| Other authors: | Universitat de Barcelona |
| Publication date: | 2012-03-19 |
| Subject(s): | Silici Nanopartícules Materials nanoestructurals Silicon Nanoparticles Nanostructured materials |
| Rights: | cc-by (c) Bertrán Serra et al., 1999
http://creativecommons.org/licenses/by/3.0/es |
| Document type: | Article |
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