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Ultrafine particles produced by plasma enhanced chemical vapor deposition -from SiH4, CH4, NH3 and B2H6 gas mixtures- for nanostructured ceramics applications
Bertrán Serra, Enric; Costa i Balanzat, Josep; Viera Mármol, Gregorio; Andújar Bella, José Luis; Canillas i Biosca, Adolf; Pascual Miralles, Esther
Universitat de Barcelona
2012-03-19
Silici
Nanopartícules
Materials nanoestructurals
Silicon
Nanoparticles
Nanostructured materials
cc-by (c) Bertrán Serra et al., 1999
http://creativecommons.org/licenses/by/3.0/es
Article
Institut d'Estudis Catalans
         

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