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Abstract:
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The characterization of stratified media has become essential in thedevelopment of industrial applications such as LEDs, solar cells, medical devices,MEMs, MOEMS, etc. This characterization involves measuring the thickness andoptical constants of thin layers with high lateral and vertical resolutions. For thispurpose, we integrated a spectroscopic reflectometer into an existing 3D optical profiler.We also analyzed how the numerical aperture affects the thickness measurements. |
